Mueller matrix spectroscopic ellipsometry

Abstract The Mueller matrix is a mathematical description of how light altered by an optical element or sample under study. It describes both intensity (irradiance) and polarization changes, including reduction the total polarization. spectroscopic ellipsometry has gained recent popularity in optics semiconductor communities as effective means to characterize complex structures anisotropic materials. While this method not new, its expansion new fields left many users with only pedestrian understanding data they collect. This tutorial provides overview focus on practical aspects for those technique.